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IJSTR >> Volume 3- Issue 3, March 2014 Edition



International Journal of Scientific & Technology Research  
International Journal of Scientific & Technology Research

Website: http://www.ijstr.org

ISSN 2277-8616



Modeling And Analysis Of The Breakdown Curve Of A High-Frequency Discharge In Hydrogen

[Full Text]

 

AUTHOR(S)

Iliycho Petkov Iliev, Snezhana Georgieva Gocheva-Ilieva

 

KEYWORDS

Index Terms: Analytic model, Breakdown curve, Gas discharge, Low-pressure discharge, Radio-frequency discharge.

 

ABSTRACT

Abstract: The subject of this study is the construction of the breakdown curves of a RF discharge in hydrogen. Based on previously developed by the authors breakdown criteria, the breakdown curves of a discharge in hydrogen were analytically constructed for the first time. Very good coincidence between the proposed analytic breakdown criteria and known in literature experiment data is obtained. A comparison is made with other breakdown criteria, developed earlier. It is found that the positive and negative electric fields occurred in the discharge influence each other.

 

REFERENCES

[1] W.M. Moreau, Semiconductor Lithography: Principles, Practices and Materials, New York: Plenum, 1988.

[2] Yu.P. Raizer, M.N. Shneider, and N.A. Yatsenko, Radio-Frequency Capacitive Discharges, New York: CRC, 1995.

[3] T. Kihara, “The Mathematical Theory of Electrical Discharges in Gases,” Reviews of Modern Physics, vol. 24, no. 1, pp. 45-61, 1952, doi:10.1103/RevModPhys.24.45

[4] V.A. Lisovskiy and V.D. Yegorenkov, “Low-Pressure Gas Breakdown in Combined Fields,” J. Phys. D.: Appl. Phys., vol. 27, No. 11, pp. 2340-2348, 1994, doi:10.1088/0022-3727/27/11/014.

[5] I.P. Iliev, S.G. Gocheva-Ilieva, and N.V. Sabotinov, “Modelling of Radio-Frequency Breakdown in Argon,” J. Optolectron. Adv. Mater., vol. 11, no. 10, pp. 1392-1395, 2009.

[6] E. Illenberger E, B.M. Smirnov, “Electron Attachment to Free and Bound Molecules,” Phys. Usp., vol. 41, pp. 651–685, 1998, doi: 10.1070/PU1998v041n07ABEH000418.

[7] V.A. Lisovskiy, J.-P. Booth, S. Martins, K. Landry, D. Douai, and V. Cassagne, “Extinction of RF Capacitive Low-Pressure Discharges,” Europhys. Letters, vol. 71, no. 3, pp. 407-411, 2005, doi:10.1209/epl/i2005-10108-1.

[8] V.A. Lisovskiy, V.D. Yegorenkov, “RF Breakdown of Low-Pressure Gas and a Novel Method for Determination of Electron-Drift Velocities in Gases,” J. Appl. Phys., vol. 31, no. 23, pp. 3349-3357, 1998, doi:10.1088/0022-3727/31/23/008.