Modeling And Analysis Of The Breakdown Curve Of A High-Frequency Discharge In Hydrogen
Iliycho Petkov Iliev, Snezhana Georgieva Gocheva-Ilieva
Index Terms: Analytic model, Breakdown curve, Gas discharge, Low-pressure discharge, Radio-frequency discharge.
Abstract: The subject of this study is the construction of the breakdown curves of a RF discharge in hydrogen. Based on previously developed by the authors breakdown criteria, the breakdown curves of a discharge in hydrogen were analytically constructed for the first time. Very good coincidence between the proposed analytic breakdown criteria and known in literature experiment data is obtained. A comparison is made with other breakdown criteria, developed earlier. It is found that the positive and negative electric fields occurred in the discharge influence each other.
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