Investigation On The Optical, Electrical And Structural Properties Of ITO On Glass Substrate
Md. Shahinul Islam, Md. Golam Saklayen, Md. Ferdous Rahman, Abu Bakar Md. Ismail
Index Terms: ITO thin film, E-beam evaporation, AFM, Annealing, Surface roughness, film thickness, Transmittance..
Abstract: This thesis paper is mainly focus firstly deposited ITO thin films on glass substrate as good transparent conducting electrode as low resistivity and high optical transmittance. Indium tin oxide (ITO) thin films have been deposited on glass substrate to be used as transparent conducting electrode.ITO has been deposited by using electron beam evaporation (E-beam) method. The surface morphology of ITO films was investigated by AFM and also studies the electrical and optical properties of these films. The effect of annealing of the ITO was also investigated. It was found that the conductivity of ITO film was proportional to the annealing temperature and time below 600°C. The surface morphology of ITO films for different annealed temperature has been also investigated by AFM and it was found that surface roughness of ITO film increase with annealing temperature.
 Davood Raouf et at all, “Surface Characterization and microstructure of ITO thin films at different annealing temperatures”, Applied Surface Science 253(2007) 9085-9090.
 Frederik C. Krebs. Polymeric Solar Cells: Materials, Design, Manufacture. DEStech Publications, Inc., Lancaster, Pennsylvania, 2010.
 “Study of Indium Tin Oxide (ITO) for Novel Optoelectronic Devices" Ph.D. thesis by Shabbir A Bashar.
 L. Hamberg et. Al , Evaporated Sn-doped In203 films: Basic optical properties and applications to energy-efficient windows, J. Appl. Phy. 60(11)(1986)R123.
 M. Berder et al, Dependence of oxygen flow on optical and electrical properties of DC-magnetron sputtered ITO films, Thin Solid Films 326(1986) 72-77.
 J.R Bellingham et al, Electrical and optical properties of amorphous indium oxide, J. Phy:condense matter 2(1990) 6207-9221.
 F.O Adurodija et al, Influence of substrate temperature on the properties of ITO films,J.Vac.Sci. Technol.A 18(3)(2000) 814-818.
 M. Buchanan et al, Preparation of conducting and transparent thin film of tin-doped oxides by magnetron sputtering, APPl. Phy.Lett. 37(2)(1980).
 V.Teixeria et al, Amorphous ITO thin films prepared by DC sputtering for electrochromic applications,Thin solid films 420-421(2002) 70-75.